Characteristics of Polycrystalline Si Nano Wire Piezoresistors
نویسندگان
چکیده
منابع مشابه
Si⁺-implanted Si-wire waveguide photodetectors for the mid-infrared.
CMOS-compatible Si⁺-implanted Si-waveguide p-i-n photodetectors operating at room temperature and at mid-infrared wavelengths from 2.2 to 2.3 µm are demonstrated. Responsivities of 9.9 ± 2.0 mA/W are measured at a 5 V reverse bias with an estimated internal quantum efficiency of 2.7 - 4.5%. The dark current is found to vary from a few microamps down to less than a nanoamp after a post-implantat...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2001
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.121.209